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机译:调查在集成光学干涉耦合器在PMMA的可见光和红外线范围“直接写“准分子激光臆造出来的辐射
Humza Mirza, Bin Wu, Sabine Tiedeken, Volker Braun, Institute of Laser and Optics, University of;
Hans Josef Brückner, Institute of Laser and Optics, University of Applied Sciences Emden/Leer;
Ulrich Teubner, Institute of Laser and Optics, University of Applied Sciences Emden/Leer;
laser beams; infrared range; couplersoptical integrationWaveguide Device ComponentExcimer lasersOptical waveguidesPolymethyl Methacrylatesingle-mode;