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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Influence of gas pressure and substrate temperature on PIII nitrocarburizing process of AISI 304 stainless steel
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Influence of gas pressure and substrate temperature on PIII nitrocarburizing process of AISI 304 stainless steel

机译：气压和基体温度对AISI 304不锈钢PIII氮碳共渗过程的影响

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摘要

Plasma immersion ion implantation (PIII) has been used to modify the surface properties of 304 austenitic stainless steel (AISI). The influence of working gas pressure, 0.2-1.0 Pa, and substrate temperature, 300-500℃, on the micro-structure, treating rate, nitrogen/carbon concentration depth profile, and surface microhardness was investigated. A gas composition of 25% C_2H_2, 75% N_2, r.f. plasma power input of 350 W, and a negatively biased potential of 30 kV were fixed during the experiment. The experimental results show that the substrate temperature and the diffusion process of nitrogen and carbon depend on the gas pressure inside the plasma chamber. The thickness of the modified layer has been found to be more than 30 μm for samples were treated in the plasma for 60 min. The results show also that the values of diffusion coefficient and surface microhardness of the treated samples are high to be 3.4 x 10~(-1) μm~2/s and 1880 kg/mm~2, respectively.
机译：等离子体浸没离子注入（PIII）已用于修改304奥氏体不锈钢（AISI）的表面性能。研究了工作气体压力（0.2-1.0 Pa）和基体温度（300-500℃）对显微组织，处理速率，氮/碳浓度深度分布和表面显微硬度的影响。气体成分为25％C_2H_2、75％N_2，r.f。实验期间固定了350 W的等离子功率输入和30 kV的负偏置电位。实验结果表明，衬底温度和氮，碳的扩散过程取决于等离子体室内的气压。对于在等离子体中处理样品60分钟的样品，发现改性层的厚度大于30μm。结果还表明，处理后的样品的扩散系数和表面显微硬度值分别为3.4 x 10〜（-1）μm〜2 / s和1880 kg / mm〜2。

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