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The mass spectrum of a tin liquid metal ion source

机译:锡液态金属离子源的质谱

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摘要

Tin is an important metal with new potential applications regarding the fabrication of novel devices. In this work the mass spectrum of a tin liquid metal ion source (LMIS) is studied in detail. Sn~(++) was found to dominate in the beam both over Sn~+ and over cluster ions. By studying the behaviour of the relative intensities of Sn~+ and Sn~(++), as a function of emission current, the conclusion is reached that both Sn~+ and Sn~(++) are emitted as a result of direct field-evaporation from the liquid surface. Cluster ions form by ion impact-aided droplet disintegration.
机译:锡是重要的金属,在新型器件的制造方面具有新的潜在应用。在这项工作中,详细研究了锡液态金属离子源(LMIS)的质谱。发现Sn〜(++)在Sn〜+和团簇离子上都占主导地位。通过研究Sn〜+和Sn〜(++)相对强度的行为,作为发射电流的函数,得出结论,Sn〜+和Sn〜(++)都是直接发射的。液体表面的场蒸发。团簇离子通过离子碰撞辅助的液滴崩解而形成。

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