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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Apparatus for real time in situ quantitative studies of growing nanoparticles by grazing incidence small angle X-ray scattering and surface differential reflectance spectroscopy
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Apparatus for real time in situ quantitative studies of growing nanoparticles by grazing incidence small angle X-ray scattering and surface differential reflectance spectroscopy

机译:通过掠入射小角X射线散射和表面微分反射光谱法对生长的纳米粒子进行实时原位定量研究的设备

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摘要

This paper describes an experimental setup that was developed to simultaneously perform grazing incidence small angle X-ray scattering (GISAXS) and surface differential reflectance spectroscopy (SDRS) measurements in ultra-high vacuum, in situ, during the three-dimensional growth of islands on a substrate, from the very beginning of the growth up to coalescence in the film. Four major features of this new GISAXS setup are: (ⅰ) the absence of window between the X-ray source and the sample, thus avoiding any unwanted background scattering; (ⅱ) the use of a high grade two-dimensional CCD detector; (ⅲ) very high flux from an ESRF undulator beamline; (ⅳ) the ability to subtract the reference from the bare substrate before deposit. This results in two-dimensional measurements that are background-free and extend over a very large intensity dynamic of a few 10~4. This allows for the first time to perform measurements on very small deposits (as low as 0.01 nm of equivalent thickness) and to record measurements in real time without interrupting the growth process. Two softwares have been developed and can be freely downloaded from the WEB in order to perform a very detailed quantitative analysis of the both GISAXS and SDRS data, allowing to probe the island size and separation from 1 to ~50 nm.
机译:本文介绍了一种实验装置,该装置可在岛上三维生长的同时,在超高真空中同时执行掠入射小角X射线散射(GISAXS)和表面微分反射光谱(SDRS)测量。从生长的最开始到薄膜的聚结为止这种新的GISAXS装置的四个主要特点是:(ⅰ)X射线源和样品之间没有窗口,从而避免了任何不必要的背景散射; (ⅱ)使用高级二维CCD检测器; (ⅲ)来自ESRF波动器光束线的通量很高; (ⅳ)沉积前从裸露的基材上减去参考值的能力。这导致二维测量是无背景的,并且延伸到几到10到4的非常大的强度动态范围。这允许首次对非常小的沉积物(等效厚度低至0.01 nm)执行测量,并实时记录测量结果而不会中断生长过程。已经开发了两个软件,可以从Web上免费下载两个软件,以便对GISAXS和SDRS数据进行非常详细的定量分析,从而可以探测岛的大小以及从1到〜50 nm的间隔。

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