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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Revisiting the stopping powers of Si and SiO_2 for ~4He ions: 0.5-2.0 MeV
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Revisiting the stopping powers of Si and SiO_2 for ~4He ions: 0.5-2.0 MeV

机译:回顾Si和SiO_2对〜4He离子的阻止能力:0.5-2.0 MeV

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摘要

Stopping cross-sections for ~4He ions in both amorphous Si and SiO_2 have been investigated over the energy region 0.5-2.0 MeV using Rutherford backscattering spectrometry (RBS), with special emphasis on the experimental determination of Q x Ω - the charge x solid angle product. The solid angle has been determined via the use of Harwell Series II Bi-implanted Si specimens. We find no significant disagreement with experimental stopping powers reported for amorphous Si. For SiO_2, our results are ~3% smaller than recent measurements. Using Bragg's rule, a functional oxygen stopping cross-section useful for RBS analyses of condensed media targets has been extracted. The reasons for simulating measured pulse height spectra, as distinct from energy spectra, are delineated.
机译:使用Rutherford背散射光谱(RBS)在能量范围0.5-2.0 MeV范围内研究了非晶Si和SiO_2中〜4He离子的终止截面,特别着重于实验测定Q xΩ-电荷x立体角产品。通过使用Harwell Series II双注入Si样品确定了立体角。我们发现与非晶硅报道的实验停止能力没有明显不同。对于SiO_2,我们的结果比最近的测量结果小〜3%。使用布拉格定律,提取了功能性的氧气截止横截面,可用于冷凝介质目标的RBS分析。描述了与能量谱不同的模拟测得的脉冲高度谱的原因。

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