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Collision cascades enhanced hydrogen redistribution in cobalt implanted hydrogenated diamond-like carbon films

机译:碰撞级联作用增强了钴植入的氢化类金刚石碳膜中的氢再分布

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摘要

Hydrogenated diamond-like carbon films produced by C_3H_6 deposition at 5 kV and implanted at room temperature with 30 keV Co atoms to 12 at.% show not only a bimodal distribution of Co atoms but also a massive redistribution of hydrogen in the films. Resonant nuclear reaction analysis was used to measure the hydrogen depth profiles (15N-method). Depletion of hydrogen near the surface was measured to be as low as 7 at.% followed by hydrogen accumulation from 27 to 35 at.%. A model is proposed considering the thermal energy deposited by collision cascade for thermal insulators. In this model, sufficient energy is provided for dissociated hydrogen to diffuse out of the sample from the surface and diffuse into the sample towards the interface which is however limited by the range of the incoming Co ions. At a hydrogen concentration of ~35 at.%, the concentration gradient of the mobile unbounded hydrogen atoms is neutralised effectively stopping diffusion towards the interface. The results point towards new routes of controlling the composition and distribution of elements at the nanoscale within a base matrix without using any heat treatment methods. Exploring these opportunities can lead to a new horizon of materials and device engineering needed for enabling advanced technologies and applications.
机译:在5 kV下以C_3H_6沉积产生的氢化类金刚石碳膜,并在室温下以30 keV的Co原子注入到12 at。%的氢化碳膜,不仅显示了Co原子的双峰分布,而且还表明了氢在膜中的大量重新分布。共振核反应分析用于测量氢深度曲线(15N方法)。测得表面附近的氢气消耗低至7 at。%,然后氢气累积为27至35 at。%。提出了一个考虑碰撞级联沉积的热能的模型。在该模型中,为离解的氢提供了足够的能量,使其从表面扩散出样品,并向界面扩散进入样品,但受到进入的Co离子范围的限制。在氢浓度〜35 at。%时,可移动的未结合氢原子的浓度梯度被中和,从而有效地阻止了向界面的扩散。结果指出了在不使用任何热处理方法的情况下控制基本基质内纳米级元素组成和分布的新途径。探索这些机会可以带来实现先进技术和应用所需的材料和设备工程的新视野。

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