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首页> 外文期刊>IEEE Transactions on Semiconductor Manufacturing >A Novel Method to Quantify Conditioner-to-Conditioner Variation and Predict Conditioner Lifetime and Process Failure Mode in Chemical Mechanical Planarization (CMP) Environment
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A Novel Method to Quantify Conditioner-to-Conditioner Variation and Predict Conditioner Lifetime and Process Failure Mode in Chemical Mechanical Planarization (CMP) Environment

机译：一种规定调节式调节器变化和预测调节器寿命和工艺破坏模式的新方法，包括化学机械平坦化（CMP）环境

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摘要

In this study, we have developed a method to quantify inherent conditioner-to-conditioner variation using a mathematical model. Quantification of the lifetime of pad and conditioner in a chemical mechanical planarization (CMP) process using the model is also elucidated. Three conditioner types are selected based on their aggressiveness, and conditioning experiments are performed with five different conditioners of the same type to quantify the variation. Assuming exponential decay equation for pad wear rate (PWR), a simple model is developed and the model parameters, K and., are derived in numeric form. K, a measure of conditioner aggressiveness, can be used as a metric to assess conditioner-to-conditioner variation, while. is a measure of conditioner lifetime. K and. values are also used to predict the failure mode of a CMP process (conditioner or pad failure mode). Pad groove depth and PWR curves of five different conditioners of the same type as a function of time are plotted along with upper and lower limits. The limiting factor (low PWR due to conditioner decay or excess pad removal) is identified to predict the failure mode. An example for each failure mode (A122 and 8031C1 conditioners for conditioner and pad failure modes, respectively) is presented.
机译：在本研究中，我们开发了一种使用数学模型来定量固定调节器到调节器变化的方法。还阐明了使用该模型的化学机械平坦化（CMP）工艺中的垫和调节剂的寿命的寿命。基于其侵略性选择三种调节剂类型，并且用相同类型的五种不同的调节剂进行调节实验以量化变化。假设用于焊盘磨损率（PWR）的指数衰减方程，开发了一个简单的模型，并且模型参数k和。，以数字形式导出。 K，衡量调理剂侵略性，可用作评估调节剂对调节器变异的指标。是一种调节剂寿命的衡量标准。 k和。值还用于预测CMP过程的故障模式（调节器或焊盘故障模式）。与时间函数相同类型的五种不同调节剂的焊盘槽深度和PWR曲线与上限和下限一起绘制。识别限制因子（由于调节器衰减或过量焊盘移除的低PWR）以预测失效模式。呈现了每个故障模式的示例（分别用于调节器和焊盘故障模式的A122和8031C1调节器）。

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