A set of force actuator was designed and tested for the active support system with a thin primary mirror to control the mirror surface error all the time. Conventional mechanisms for the force actuator with high accuracy and fine stability in engineering applications were studied. Then, based on the requirements of actuality and implementation in the thin primary mirror experiment system, a set of force actuator was designed and calculated in detail. A stepper motor integrated with a harmonic reducer was used to actuate the mechanism and precision screw to transmit, and an S-type Loadcell was taken as the force sensor to realize the feedback of force output. Finally, the mechanism was tested to validate the design feasibility through the opened loop and closed loop controls. Experimental results indicate that travel range of the force actuator is 0-10 mm, force range is -100-100 N and the accuracy is better than 0. 05 N, which satisfies the demands of the force actuator for long range, high accuracy, fine output and stability. The actuator can be used in the support system of active optics, and is also a useful mechanism to other fine-tune structures.%设计了一套用于控制薄镜面主镜面形的力促动器,并进行了实验测试.分析了常用的可以实现高精度、高稳定性的力促动器结构形式；结合实际情况和目前薄镜面主动光学实验系统的要求,设计了由步进电机驱动谐波减速器、精密丝杠传动,S型Loadcell反馈输出力变化的力促动器结构.最后,通过开环和闭环实验对结构进行了测试.实验结果表明,该力促动器行程为0～10 mm,输出力为-100～100 N,精度优于0.05 N,满足大行程、高精度微量输出和高稳定性要求,可以应用于主动光学支撑系统,同时也适用于其他精密调整结构.
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