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首页> 中文期刊> 《中国物理快报：英文版》 >Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films

Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films

         
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摘要

The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructurai and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500℃. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500℃ has a minimum of column angle about 12℃. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.

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  • 来源
    《中国物理快报：英文版》 |2008年第6期|2181-2184|共4页
  • 作者

    XIAO Xiu-Di; DONG Guo-Ping; QI Hong-Ji; FAN Zheng-Xiu; HE Hong-Bo; SHAO Jian-Da;

  • 作者单位

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

    Graduate School of the Chinese Academy of Science, Beijing 100049;

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

    Graduate School of the Chinese Academy of Science, Beijing 100049;

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

    Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800;

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800;

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  • 正文语种 chi
  • 中图分类 物理学;
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