Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate

周燕; 王海龙; 马传贺; 龚谦; 封松林

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Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate

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摘要

Hinged mirror arrays are widely utilized for display applications and optical communication.They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers.A multilayer structure including a strain-compensated layer,a digital alloy sacrificial layer and a strain bilayer,is grown by molecular-beam epitaxy.Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching.The hinge fabrication method with a strain bilayer is simple and flexible.Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures.

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《中国物理快报：英文版》 |2011年第7期|298-300|共3页
作者
周燕; 王海龙; 马传贺; 龚谦; 封松林;
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作者单位

Shandong Provincial Key Laboratory of Laser Polarization and Information Technology;

Department of Physics;

Qufu Normal University;

Qufu 273165;

State Key Laboratory of Functional Materials for Informatics;

Shanghai Institute of Micro-system and Information Technology;

Chinese Academy of Sciences;

Shanghai 200050;

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原文格式 PDF
正文语种 chi
中图分类金属学与热处理;
关键词
alloy; mirror; enable;

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Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate

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