Influence of O2 Flux on Compositions and Properties of ITO Films Deposited at Room Temperature by Direct-Current Pulse Magnetron Sputtering

著录项

• 来源
  《中国物理快报：英文版》 |2010年第12期|173-176|共4页
• 作者

  王华林; 丁万昱; 刘超前; 柴卫平;

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• 作者单位

  School of Materials Science and Engineering;

  Dalian diaotong University;

  Dalian 116028;

  Engineering Research Center of Optoelectronic Materials and Devices;

  Education Department of Liaoning Province;

  Dalian 116028;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 燃料电池;
• 关键词

  ITO薄膜; 脉冲磁控溅射; 铟锡氧化物; 沉积通量; 室温; 直流; 性质; 组成;