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晕开不良修复方法及影响因素的研究

         

摘要

Particle Gap is a common defect in TFT-LCD field,however,there was no mature method to repair it.In this paper,firstly,particle gap formation mechanism was studied and based on the mechanism,the model of repair method was established and proved by experiments.Two repair methods of one product particle gap were studied,the success ratio of laser cracking method and pressing method were 30% and 70%,respectively.By analyzing repair effect actors,experiment results indicated that:in laser crack change method,particle position in pixel was the most important actor when laser power was optimized from 4 μJ to 10 μJ.In pressure shape change method,particle height was the most important actor when pressure was optimized from 30 N to 50 N.Based on repair model and effect actor analysis,a product was repaired and the success ratio reached to 79%.%作为TFT-LCD常见的晕开不良,目前无成熟、系统的修复方法.本文依据TFT-LCD晕开不良形成机理,建立修复模型并实验验证该模型.通过激光照射裂变法及按压形变法对某款产品晕开不良进行修复验证,裂变法及形变法修复成功率分别达到30%和70%.通过修复影响因素分析,结果表明,裂变法在照射能量为4~10Ⅳ时,异物颗粒所在位置决定其修复效果;形变法在按压力度为30~50 N时,异物高度及成分成为其修复成功的决定因素.最后本文以上述理论分析和实验结果为指导,对一款晕开不良产品进行按压修复且成功率达到79%.

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